Pressure + X/Z two-axis acceleration composite sensors monolithically integrated in non-soi wafer for upgraded production of TPMS (tire pressure monitoring systems)

Abstract

The paper reports a novel low-cost batch fabrication technique for monolithically integrated pressure plus two-axis (X/Z) acceleration composite sensors for upgraded production of automobile TPMS (tire-pressure monitoring systems). The newly added X-axis accelerometer is used for automatically identifying and positioning each of the four wheels. Benefited from the single-wafer front-side fabrication technique on non-SOI wafers, the sensor has the advantages of small chip-size of 1.9mm∗1.9mm, low cross-talk interference, low-cost and compatible process with IC-foundries. Testing results of the TPMS sensor meet the requirements of upgraded TPMS application.