Abstract
This article describes theperformance of pressure sensors for ciyogenic media, produced by the industrial group MID A. The company claims that these sensors are superior to any similar devices made in Russia. One of the features is that its primary converter can be installed directly on a tank or pipeline with a cryogenic medium. This is enabled by the use of Silicon-on-Sapphire measuring element. The sensor is capable to measurepressure and temperature simultaneously, using the same sensing element. We demonstrate that the sensor has good metrological characteristics at liquid nitrogen temperatures, and show how the process of thermal cycling in the calibration and manu facturing of the device influences the stabilization of its output signal.
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