Abstract
We describe the use of on-chip buckled-dome Fabry-Perot microcavities as pressure sensing elements. These cavities, fabricated by a controlled thin-film buckling process, are inherently sealed and support stable optical modes (finesse >103), which are well-suited to coupling by single-mode fibers. Changes in external pressure deflect the buckled upper mirror, leading to changes in resonance wavelengths. Experimental shifts are shown to be in good agreement with theoretical predictions. Sensitivities as large as ∼1nm/kPa, attributable to the low thickness (<2µm) of the buckled mirror, and resolution ∼10Pa are demonstrated. We discuss potential advantages over traditional low-finesse, quasi-planar Fabry-Perot pressure sensors.
Published Version
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