Abstract
The pressure dependence of the charging effect, a new parameter influencing the charge-up of insulating samples in monochromatized small spot X-ray photoelectron Spectroscopy (XPS) experiments, is reported. The nature and the extent of the pressure effect differ widely from sample to sample. For a typical insulator such as poly(tetrafluoroethylene) (PTFE) the main function of an increased pressure in the analysis chamber seems to be a buffer of differential charging on the surface of the sample. Argon, an inert gas conventionally used for ion sputtering, is an ideal candidate for the control of pressure. For mono XPS measurements of insulators, the reasonableness of the ultrahigh vacuum (UHV) condition (10 −9 Torr or less) is questionable.
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