Abstract
Two-dimensional catalytic combustion patterns, which can be used as heat source in micro-nano scale MEMS devices such as gas sensor and micro-generator, are fabricated by inkjet printing (IJP). The performances of the catalytic patterns are evaluated by both traditional catalytic activity measurement and infrared thermography (IR) camera. Results show that ultra-low (0.014 mg cm−2) loading and high utilizing (34,710 mW mg−1) of Pt catalysts can be achieved by inkjet printing method. Spontaneous combustion is also observed for the printed Pt/Al2O3 powder membrane at rather low initiation temperature and small scale. The IR camera analysis indicates the uniform temperature distribution and rapid temperature response of the micro-patterned catalyst surface. With the advantages of the inkjet printing, this new direct-write method would, in principle, open up possibilities of these special catalyst patterns serving as micro energy sources for MEMS applications.
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