Abstract

With Pulsed Laser Deposition, Multilayer Zone Plates can be fabricated to focus hard x-ray beams into 2D spots smaller than 10 nm. To put these optics into use for imaging applications, we have commissioned a new dedicated sample tower as a high-resolution module for the GINIX instrument, stationed at the P10 beamline at PETRA III. Here we summarise the motorisation and show first imaging benchmark results obtained with a “traditional” Fresnel Zone Plate. The first 2D continuous STXM scan using the new EigerX 4M detector at full 750 Hz speed is shown: a field of view of roughly about 1 μm squared has been recorded with 255 × 255 images within 96 seconds.

Highlights

  • Multilayer Zone Plates (MZPs) are basically an “optically thick” version of Fresnel Zone Plates (FZPs) [5, 6]; the fabrication using a sputter–slice technique – in our case pulsed laser deposition and slicing with a focused ion beam – allow for smooth outer most layers of width well below 10 nm and an optical thickness of several micro metre

  • Sources of vibrations are located and removed; on the other end, the general purpose and tomography sample tower is exchanged with high resolution towers bringing optic (MZP or waveguide) and sample motorisation on a common base

  • Due to the large working distance of 34.5 mm, these experiments are less prone to collisions than with short-f MZPs

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Summary

Introduction

Multilayer Zone Plates (MZPs) are basically an “optically thick” version of Fresnel Zone Plates (FZPs) [5, 6]; the fabrication using a sputter–slice technique – in our case pulsed laser deposition and slicing with a focused ion beam – allow for smooth outer most layers of width well below 10 nm and an optical thickness of several micro metre. 1. Introduction Multilayer Zone Plates (MZPs) are basically an “optically thick” version of Fresnel Zone Plates (FZPs) [5, 6]; the fabrication using a sputter–slice technique – in our case pulsed laser deposition and slicing with a focused ion beam – allow for smooth outer most layers of width well below 10 nm and an optical thickness of several micro metre.

Results
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