Abstract
Zinc oxide thin films are prepared on LiNbO3 single-crystal substrates with the preliminary deposition of a buffer layer consisting of zinc niobate of the composition ZnNb2O6 with an orthorhombic crystal lattice or the composition Zn3Nb2O8 with a monoclinic crystal lattice. The phase composition, the thickness, and the quality of the films are characterized using X-ray powder diffraction and electron microscopy.
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