Abstract
Epitaxial YBa2Cu3O7 (YBCO) films were prepared on cerium oxide-buffered sapphire (r-cut α-Al2O3) substrates by an excimer-laser-assisted metalorganic deposition (ELAMOD) using a scanning substrate mode. The substrate surface was scanned under homogenized KrF excimer laser beam irradiation after application of a fluorine-free ingredient solution. The ELAMOD process has brought about the advantages of shorter heating time as well as higher critical current density (Jc) of the YBCO films. The Jc values over 6MA/cm2 were measured by an inductive method at 77.3K for the laser-irradiated areas. The scanning laser irradiation is considered to produce a desirable precursor for crack free films with high-Jc and to shorten the total time of heat treatment, in which three metal components are well-dispersed in short time. Such a precursor has contributed to prevent the occurrence of impurity phases, resulting in the high-Jc YBCO films. The X-ray diffraction measurement of the irradiated area clearly showed a complete c-axis-oriented YBCO and no impurity phases, whereas a-axis-oriented YBCO was dominant in the area without irradiation. The ELAMOD process using the scanning substrate mode has a potential ability to apply to continuous production of the large-area films or long tapes of YBCO.
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