Abstract
Ultra water-repellent films were prepared using tetramethylsilane (TMS) and fluoro-alkyl silane (FAS) by microwave plasma-enhanced CVD (PECVD). The contact angle for water drops increased with the total pressure of reactants. The maximum contact angle was about 160°. Surface roughness increased with total pressure due to the growth of particles. Water repellency was dominated by not only the fluorine concentration at the surface but also the surface roughness.
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