Abstract
This paper presents the preparation of Tl2Ba2Ca2Cu3Ox thin films on 2″ LaAlO3-substrates for microwave applications and some aspects of phase formation. We found barium cuprate but no calcium cuprate as an intermediate phase before Tl2O is incorporated into the film. Steps necessary for the formation of Tl2Ba2Ca2Cu3Ox-films with c-axis orientation are outlined. Our highest quality film exhibits a surface resistance of Rs = 6.5 mΩ at 87 GHz and 77K .
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