Preparation of titanium dioxide films on etched aluminum foil by vacuum infiltration and anodizing

Abstract

Al2O3–TiO2 (Al–Ti) composite oxide films are a promising dielectric material for future use in capacitors. In this study, TiO2 films were prepared on etched Al foils by vacuum infiltration. TiO2 films prepared using a sol–gel process were annealed at various temperatures (450, 500, and 550°C) for different time durations (10, 30, and 60min) for 4 cycles, and then anodized at 100V. The specimens were characterized using X-ray diffraction, field emission scanning electron microscopy, and field emission transmission electron microscopy. The results show that the tunnels of the specimens feature a multi-layer structure consisting of an Al2O3 outer layer, an Al–Ti composite oxide middle layer, and an aluminum hydrate inner layer. The electrical properties of the specimens, such as the withstanding voltage and specific capacitance, were also measured. Compared to specimens without TiO2 coating, the specific capacitances of the TiO2-coated specimens are increased. The specific capacitance of the anode Al foil with TiO2 coating increased by 42% compared to that of a specimen without TiO2 coating when annealed at 550°C for 10min. These composite oxide films could enhance the specific capacitance of anode Al foils used in dielectric materials.