Abstract
Modified spin-coating method has been applied to grow thin films of titanium dioxide. With this modification, it is possible to use ammonium titanyl oxalate in the form of its aqueous solutions as starting material. The resulting thin films are characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), UV–visible spectroscopy and X-ray photoelectron spectroscopy (XPS). The results show that aqueous precursor form anatase TiO 2 thin films, which are qualitatively comparable to the films grown by other wet chemical techniques.
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