Abstract
This paper presents a procedure of dc gas discharge activating reaction deposition for preparing ultrafine particle films. The dependence of the properties of the films on preparation and post-treatment conditions was studied. The result shows that the samples resemble the morphology of ultrafine particles and have a mean particle size of about 50 nm. The three beams of electron, ion and laser can greatly change the morphology and particle size of the samples. This may be a way to modify tin oxide ultrafine particle films and obtain the required properties. The ultrafine particle films prepared by this procedure may serve as high-quality gas sensors.
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