Abstract
Plasma polymerizations of the mixture of perfluorobenzene (PFB) and sulfur dioxide (SO2) or carbon dioxide (CO2), and the mixture of benzene (BZ) and SO2 or CO2 were investigated to obtain plasma polymer films with ionic groups such as sulfonic or carboxylic acid groups. The plasma polymerization of the mixture of PFB or BZ and SO2 gave plasma polymer films containing sulfonic acid groups. The plasma polymerization of the mixture of PFB and CO2 deposited plasma polymer films with carboxylic acid groups but that of the BZ/CO2 mixture deposited plasma films with no carboxylic acid groups.
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