Abstract
We have grown high-quality YBCO epitaxial films with c-axis orientation on MgO(100) and SrTiO 3(100) crystalline substrates by pulsed laser deposition method using the fourth harmonics of Nd:YAG laser. The deposition conditions are followings: substrate temperature T s=760°C, oxygen pressure P o=50Pa, laser frequency v=1Hz, and laser energy density σ=1J/cm 2/pulse, which differ slightly from those of excimer laser. Those conditions originate from the feature of YAG laser which has a smaller pulse width and a higher peak-energy than that of excimer laser.
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