Preparation of SrSe thin films by hot wall deposition

Abstract

SrSe thin films which are expected to be effective for blue-emitting thin films electroluminescent (TFEL) devices with good chromaticity have been, for the first time, prepared by the hot wall deposition technique. The structural properties of the films are considerably influenced by the ratio of Sr atoms to Se arriving at the substrate. The properties are also sensitive to the substrate temperature. For the SrSe film prepared at a substrate temperature of 400°C, [110] orientation is predominant when the ratio is kept at 1:2. The crystallinity is improved with increasing substrate temperature, although the degree of [110] orientation decreases. The best crystallinity is achieved when the ratio of arriving Sr atoms to Se is 1:2 and the substrate temperature is 600°C. It is shown by Auger electron spectroscopy (AES) that the film is nearly stoichiometric and that contaimination due to oxygen and carbon is negligible.