Abstract
Thin films of ZrO2, Ta2O5, and lead zirconate-titanate, PZT, about 100 nm to 1000 nm in thickness, were prepared by electrophoretic deposition from transparent sols obtained by hydrolysis of metal alkoxides. Stainless steel plates and Pt-coated glass plates were used as substrates/electrodes. The constant voltage method was employed. The applied field was up to 20 V/cm. Thickness and refractive indices measurements were made by ellipsometry. The refractive indices of as-dried films were high. Uniformity of the chemical composition of PZT films, determined by electron probe microanalysis, EPMA, and Auger electron spectroscopy, AES, was better than the dip-coated PZT films. Effects of deposition conditions on physical properties of the films were discussed.
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