Preparation of porous silicon nitride ceramics by microwave sintering and its performance evaluation

Abstract

In this paper, the preparation methods of porous silicon nitride materials with controllable dielectric constant and pore structure were systematically studied. By using microwave sintering technology, porous silicon nitride materials with high closed pore ratio were prepared by adjusting the content of sintering additives and sintering process parameters, and controlling the grain boundary phase and pore structure and size. The effects of sintering conditions on the total porosity, closed porosity, pore structure and dielectric properties of materials were systematically studied.