Abstract
Mo-doped VO2 films were fabricated on fused silica substrates by the atomic layer deposition of VO2/MoO3 nanolaminates and subsequent post-annealing. The effect of the number of VO2/MoO3 interfaces as well as annealing conditions on the film morphology, structure, and thermochromic properties were systematically studied. Among them, increasing the annealing temperature has the most significant effect on the formation of the porous structure in Mo-doped VO2 films. The porous Mo-doped films, with their phase transition temperature of near room temperature, have a large potential on the application of smart windows and smart optical solar reflectors.
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