Abstract
Catalytic combustion sensors are widely used for H2 gas sensing because they use a simple sensing mechanism and have high chemical, thermal, and mechanical durability by virtue of their simple structure. In this study, Pd, Pt, and Pd–Pt-loaded TiO2 thin films were prepared. Their respective capabilities as H2 gas combustion sensors were investigated. The TiO2 thin films were prepared using sol-gel method on a glass substrate. Then Pd and/or Pt was loaded on them using photocatalytic deposition. H2 gas sensing was assessed at 300°C by measuring the sample resistance under H2 gas (3–100%) and air flow conditions. A Pd–Pt step-by-step loaded sample showed higher sensitivity than either a Pd or Pt single-loaded sample for H2 concentrations of less than 30 vol%. Scanning transmission electron microscopic (STEM) observation revealed its structure: Pt fine particles deposited selectively on the Pd particles pre-deposited on the TiO2 surface. The large surface area of the catalyst and the synergetic effect of Pd and Pt are expected to contribute to the catalytic activity.
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