Preparation of parallel capacitor of epitaxial SrTiO3 film with a single-crystal-like behavior

Abstract

Epitaxially grown SrTiO3 thin films with single-crystal-like dielectric behavior were obtained by the chemical mechanical planarization method. A parallel capacitor of a SrTiO3 film with excellent insulation was fabricated between YBa2Cu3O7−δ electrodes by pulsed laser deposition. Dielectric constants of the parallel capacitor with a thickness of 300–600 nm are 330 and >20 000 at room temperature and 4.2 K, respectively, and obey the Curie–Weiss law above 150 K, being identical to the behavior of SrTiO3 single crystals. The microshort-free insulating film may aid in the development of oxide superconductor multilayer devices, such as superconducting quantum interference devices, three-terminal transistors, and field effect transistors.