Abstract
C-Pd films were obtained by Physical Vapor Deposition (PVD) or by annealing of these initial PVD films at 650°C in different time (5, 10 and 30 minutes) in argon flow. These C-Pd films were characterized by Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) and FTIR spectroscopy. The sensing properties of the films were studied in a specially prepared chamber allowing for measurements of the changes in resistivity as a function of gas composition changes. It was found that annealing changes the films morphology, topography and structure, and consequently their sensing properties.
Highlights
Since Seiyama [1] developed the first solid-state gas sensor, many other research groups have been attempting to improve gas sensors, with the aim of enhancing their sensing performance
C-Pd films were obtained by Physical Vapor Deposition (PVD) or by annealing of these initial PVD films at 650°C in different time (5, 10 and 30 minutes) in argon flow
These C-Pd films were characterized by Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) and FTIR spectroscopy
Summary
Since Seiyama [1] developed the first solid-state gas sensor, many other research groups have been attempting to improve gas sensors, with the aim of enhancing their sensing performance. IOP Publishing Journal of Physics: Conference Series 564 (2014) 012002 doi:10.1088/1742-6596/564/1/012002 Preparation of nanocomposite carbonaceous films containing palladium nanograins and studies of the annealing time influence on their structure and sensing properties A Kamińska1, M Kozłowski1, P Dłużewski2, E Czerwosz1 1Tele and Radio Research Institute, Ratuszowa 11, 03-450 Warsaw, Poland 2Institiute of Physics, Polish Academy of Science, Al. Lotników 32/46,02-668 Warsaw, Poland
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