Preparation of multi‐tip arrays on flexible substrates for large‐scale microfabrication

Abstract

Scanning probe microscopy (SPM) provides an important way for micro/nanofabrication. Compared with single-tip mode, parallel multi-tip mode enables an effective way for microfabrication with large scale and high efficiency by SPM. During the preparation of multi-tip array, the height difference between different tips is quite difficult to be eliminated. In the present work multi-tip arrays were prepared on different flexible rubber substrates with good bonding strength. Finite element analysis was carried out based on a hyperelastic constitutive model for selecting a suitable rubber substrate for producing the multi-tip array, and the initial shear modulus C 10 should be from 0.5 to 17. A series of comparative fabrication experiments were conducted by different multi-tip arrays. The multi-tip array with flexible substrates fulfilling the prediction model can compensate obviously the height difference resulting from microsphere size, and the flexible substrate with a lower C 10 in this range is better for the scratching fabrication. Using the multi-tip array, large-scale surface patterning can be fabricated with low cost and easy operation. This work can promote the wide application of SPM and development of the surface texture engineering.