Preparation of MgO films as buffer layers by laser-ablation at various substrate temperatures

Abstract

MgO thin films were deposited on Si(100) substrates by laser ablation under various substrate temperatures (Tsub), expecting to provide a candidate buffer layer for the textured growth of functional perovskite oxide films on Si substrates. The effect of Tsub on the preferred orientation, crystallinity and surface morphology of the films was investigated. MgO films in single-phase were obtained at 473–973 K. With increasing Tsub, the preferred orientation of the films changed from (200) to (111). The crystallinity and surface morphology was different too, depending on Tsub. At Tsub=673 K, the MgO film became uniform and smooth, exhibiting high crystallinity and a dense texture.