Abstract
Thin (1000 Å) reflective (mirror-like) tin films are formed by introducing tetramethyltin and O 2 gas into a glow discharge. The resulting films show a sheet conductivity in the range of about 10 2–10 4 Ω −1 cm −1. The films are stable at ambient conditions for more than 1 year (without any change in sheet conductivity). Heating the films up to about 63°C does not change the conductivity appreciably, but prolonged heating at higher temperatures increases the conductivity irreversibly. Electron spectroscopy for chemical analysis results show a trace amount of carbon on the surface of the film, but the bulk of the film is essentially carbon free. Electron diffraction and X-ray photographs of the films are indexed as β-Sn. The films adhere strongly to metals, ceramics, composites and plastics and act as good water vapor barriers (1.76 × 10 −14 cm 3 (STP) cm cm −2 s −1 cmHg −1 where STP denotes standard temperature and pressure). The effect of the flow rate of O 2 on the film characteristics is discussed.
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