Abstract
In this paper, SrTiO3/LaNiO3 (STO/LNO) bilayer films were prepared on lanthanum aluminate (LAO) substrates by use of the sol–gel technique. An array of LNO electrodes with diameters of 200μm was prepared on the surface of STO/LNO bilayer films. Therefore, LaNiO3/SrTiO3/LaNiO3 (LNO/STO/LNO), a capacitor structure with symmetrical top and bottom electrodes, was obtained. The XRD analysis showed that the obtained capacitor structure has a biaxial texture. The dielectric test suggested that the relative dielectric constant of the LNO/STO/LNO structure is symmetric, has a high tunability, and has a low dielectric dissipation factor (tanδ) in response to varying electric field bias. As the temperature decreased, the relative dielectric constant of the STO film increased, the tunability increased, and the tanδ decreased. At test conditions of 80K and 100kH, the tunability and the figure of merit (FOM) reached 56% and 107, respectively.
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