Preparation of La<sub>0.9</sub>SR<sub>0.1</sub>Ga<sub>0.8</sub>Mg<sub>0.2</sub>O<sub>3</sub><sub>-δ</sub> Electrolyte Films Deposited by RF Magnetic Sputtering

Abstract

La0.9Sr0.1Ga0.8Mg0.2O3-d (LSGM) electrolyte materials were synthesized using solid state reactions. The LSGM material film was deposited by radiofrequency magnetic sputtering on La0.7Sr0.3Cr0.5Mn0.5O3-d (LSCM) substrates. The analysis results show the films did not form but formed some “mountains” when deposited for 4 h. While the depositing time extended to 12 h, a dense and uniform film with perovskite phase was obtained, and the element amounts of the film were closed to those of the LSGM materials.