Abstract

A source of composition-selected multi-element cluster ions has been developed toward investigation of chemical reactivity of the clusters supported on a solid surface. The cluster ions are produced in a gas aggregation cell equipped with several magnetron sputtering devices, and their composition is selected by a quadrupole mass filter. The translational and internal kinetic energies of the single-composition cluster ions are reduced by collision with cold helium to achieve cluster-impact deposition onto the surface at a low collision energy. It has been succeeded to obtain single-composition silver-copper bimetal cluster ions more intense than several tens pA. A typical translational energy width is 0.5 eV per cluster.

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