Preparation of indium tin oxide targets with a high density and single phase structure by normal pressure sintering process

Abstract

The present work mainly describes the technology for preparing indium-tin oxide (ITO) targets by cold isostatic pressing (CIP) and normal pressure sintering process. ITO powders were produced by chemical co-precipitation and shaped into an ITO green compact with a relative density of 60% by CIP under 300 MPa. Then, an ITO target with a relative density larger than 99.6% was obtained by sintering this green compact at 1550°C for 8 h. The effects of forming pressure, sintering temperature and sintering time on the density of the target were investigated. Also, a discussion was made on the sintering atmosphere.