Abstract
Abstract. Mo-Nb, Mo-Ti, Mo-Ni-Ti sputtering target samples were prepared using Mo powder, Nb powder,Ni powder and Ti powder as raw materials by hot isostatic pressing (near net forming). The density, phase composition, microstructure and element distribution of Mo-Nb, Mo-Ti, Mo-Ni-Ti sputtered target samples were measured by optical microscope, scanning electron microscope and energy dispersive spectrometer. The experimental results show that hot isostatic pressing can prepare Mo-Nb target at lower temperature, and the obtained samples have finer grains, higher density and more uniform element distribution than that of non-pressure sintering. High-quality Mo-Nb, Mo-Ti, Mo-Ni-Ti sputtering targets (density>99%, grain size<100 μm) were obtained by hot isostatic pressing.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
