Abstract

Highly transparent TiO2 and TiO2-based binary oxide (TiO2/SiO2 and TiO2/B2O3) thin films of different TiO2 contents were successfully prepared by using an ion engineering technique as a dry process. These transparent thin films showed very high photocatalytic performance due to the low scattering of the incident light as compared to powdered TiO2 samples. Also, TiO2-based binary oxide thin films involving a highly dispersed tetrahedral Ti-oxide species showed unique photofunctionality for the direct decomposition of NO and surface wettability. In addition, the loading of small amounts of Pt increased the photocatalytic reactivity of the TiO2 thin films without decreasing the high transparency.

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