Abstract
Co1-xPtx (0≦x≦0.2) thin films were prepared by using a Target-Facing type of high-rate sputtering (TFTS). The films deposited at lower argon gas pressure PAr(≦5 mTorr) have only a low coercive force Hc (<700 Oe). However, the value of Hc for films deposited at higher PAr (≧10 mTorr) increases monotonically as the Pt content increases, and films with high Hc (>1 kOe) can be obtained at a Pt content of above 11 at%. These films, whose crystallites are oriented randomly, also have a large inplane uniaxial magnetic anistropy constant K1 (\\cong2.5×106 erg/cc) and excellent hysteresis loop squareness (S\\cong0.87, S*\\cong0.98).
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