Abstract
An evaporation-reaction type aerosol generator for ultrafine tin dioxide particles has been developed, and the effect of its evaporating temperature on particle size distributions and number concentrations of the generated ultrafine tin dioxide particles has been studied. The particles are drawn with high velocity into a deposition chamber with a pressure of about 400 Pa, and are deposited by inertia on a glass substrate, where they form a thin film. The electrical characteristics of this film are evaluated. The conductance of the film increases with the decrease of film thickness and with the increase of the substrate temperature. The current-voltage relation of the film is ohmic. It is shown that the ultrafine tin oxide particle film can selectively detect the gases N 2 and O 2 and is very sensitive to H 2.
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