Abstract
Orthorhombic perovskite-type K0.5Na0.5NbO3 (KNN) films on Pt/Ti/SiO2/Si substrates were prepared by sol-gel processing. The morphology of the films was characterized using SEM and AFM. The KNN films with a total thickness of about 0.5 micron had relatively dense and uniform microstructure. The ferroelectricity of the KNN films was confirmed by polarization-electric field (P-E) hysteresis loop.
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