Abstract
Fine-patterned Bax Sr1-x TiO3 (BST) thin films were successfully fabricated from a photosensitive sol-gel solution by means of UV irradiation. This solution was prepared from barium acetate, strontium acetate, and titanium isopropoxide. BST gel films on substrates formed from the solution by spin-coating were irradiated with UV rays through a mask pattern and developed with a mixture of ethanol and water. The obtained patterns were a negative of the mask. The films were finally annealed for crystallization. The obtained films had perovskite structure and good properties.
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