Abstract
Diamond-like carbon (DLC) films were prepared on Si (100) substrates byion implantation from an electron cyclotron resonance microwave plasmasource. During the implantation, 650 W microwave power was used toproduce discharge plasma with methane as working gas, and -20 kV voltagepulses were applied to the substrate holder to accelerate ions in theplasma. Confocal Raman spectra confirmed the DLC characteristics of thefilms. Fourier-transform infrared characterization indicates that theDLC films were composed of sp3 and sp2 carbon-bondedhydrogen. The hardness of the films was evaluated with a NanoIndenter-XP System. The result shows that the highest hardnessvalue was 14.6 GPa. The surface rms roughness of the films was as lowas 0.104 nm measured with an atomic force microscope. The frictioncoefficient of the films was checked using a ball-on-diskmicrotribometer. The average friction coefficient is approximately 0.122.
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