Abstract
Carbon thin films were prepared from Decacyclene on quartz substrates with Chemical Vapor Deposition (CVD) process at 900°C under various conditions. The thickness and the electrical conductivity of these carbon thin films were measured by analytical instrument. As a result, it was found that the thickness of the obtained carbon thin films was controlled in the range of 0.1-1.5 μm by changing raw material temperature, reaction time, and the flow rate of carrier gas, and the electrical conductivity tended to increase with decreasing the thickness.
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