Abstract
Abstract Crystalline TiO2 thin films were successfully prepared on thermally unstable polycarbonate substrates without any inorganic or organic binders at low temperature (ca. 353 K) by a RF-magnetron sputtering deposition method. The anatase structure of TiO2 could be confirmed by XRD measurements. These thin films showed high transparency and mechanical stability and were not susceptible to peeling by scratching or bending. These TiO2 thin films prepared on polycarbonate substrates also exhibited photoinduced superhydrophilicity under UV light irradiation.
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