Abstract
BaTi0.975Zr0.025O3 thick films were prepared by a screen-printing method on Pt bottom electrodes using silicon substrates in the firing temperature range from 1330°C to 1370°C. The high-temperature sintering of Pt bottom electrodes and Ba(Ti,Zr)O3 thick films was successfully achieved using silicon substrates with a fairly thick oxide layer. The ferroelectric and piezoelectric properties of the thick films were examined. The remanent polarization of the thick films increased with increasing firing temperature. A remanent polarization of 13.8 µC/cm2 for a Ba(Ti,Zr)O3 thick film was obtained at a firing temperature of 1370°C. The longitudinal piezoelectric constant d33 calculated from a unipolar signal (10 kV/cm, 1 Hz) curve was 610 pC/N for the thick film fired at 1370°C.
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