Preparation of BaTiO3 and SrTiO3 Polycrystalline Thin Films on Flexible Polymer Film Substrate by Hydrothermal Method

Abstract

Well-crystallized polycrystalline thin films of cubic barium titanate, BaTiO3, and strontium titanate, SrTiO3, have been prepared on the Ti-deposited flexible polymer film of polyphenylen sulfide in Ba(OH)2 and Sr(OH)2 aqueous solutions at temperatures between 120 and 180°C under saturated vapor pressures. The films were dense and lustrous like a mirror. The thicknesses of the films were in the range of 50-250 nm for the hydrothermal treatment time of 1-3 h at those temperatures. The grains were generally uniform and their typical average size for the film formed at 150°C for 1 h in 3N-Ba(OH)2 was approximately 50 nm.