Abstract
Radio-frequency magnetron sputtering conditions have been optimized for the fabrication of (Ba0.67Sr0.33)TiO3 (BST) thin films for the dielectric bolometer mode of uncooled infrared focal plane arrays on Pt/Ti/SiO2/Si substrates. X-ray diffractometry shows the BST films to have a perovskite structure. These films exhibit good surface morphology as determined by scanning electron microscopy. The dielectric properties of the BST thin films have been measured as a function of temperature at various applied fields. According to the dielectric constant–temperature curve, the Curie temperature of the BST thin films is about 30 °C, around room temperature. The maximum change of the dielectric constant at zero applied field is as large as 78 K—1, which corresponds to a temperature coefficient of dielectric constant of around 21% K—1. The merit figure of the BST thin films is about 4.5 × 10—5–6.2 × 10—5 Pa—1/2 at 1 V μm—1 applied field in the temperature range 20–50 °C.
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