Abstract
We comprehensively study the co-precipitation preparation of aluminum doped zinc oxide (AZO) nanoparticles, ceramic target and thin film deposition. The When the calcination temperature exceeded 700 °C, ZnAl2O4 phase appeared. The resistivity and relative density of the AZO target pressed from nanoparticles were 3×10-3 Ω∙cm and 99.1%, respectively. The minimum resistivity of AZO thin films prepared by DC sputtering of the ceramic target reached 4.1×10–4 Ω∙cm with the mobility of 33 cm2/v∙s and the carrier concentration of 4.5 ×1020 cm-3. The average optical transmittance of the AZO thin films in the visible wavelength range (400-800 nm) was more than 80%.
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