Abstract
Anodic aluminum oxide (AAO) layers with nano-sized pores have been used as shadow masks for the fabrication of two-dimensional (2D) metal nanodot arrays (NDAs). However, the localized surface plasmon resonance (LSPR) of size-controlled NDAs fabricated using AAO masks has not been much studied. In this study, we report on the improved preparation method and utilization of an ultrathin AAO mask for the fabrication of 2D plasmonic metal NDAs. The greatest challenge in preparing an AAO mask is to control the pore diameter and to make it reproducible. AAO masks with size-controlled pores were reproducibly prepared using a two-step chemical wet etching method. Ag NDAs with different dot diameters (42, 60, and 80 nm) and Ag, Cu, and Au NDAs with dot a diameter of 80 ± 5 nm were fabricated on indium tin oxide glass substrates using AAO masks. The wavelengths corresponding to LSPR of 2D metal NDAs were investigated using ultraviolet–visible spectroscopy. Our results show that AAO masks with tunable pores can be used as shadow masks for the fabrication of 2D plasmonic NDAs.
Highlights
Fabrication techniques for two-dimensional (2D) plasmonic nanodot arrays (NDAs) have attracted significant attention in versatile plasmonic applications for the enhancement of the performance of optoelectronic devices and for the highly sensitive detection of biological and chemical sensors [1,2,3]
We demonstrated reproducible fabrication and plasmonic properties of size-controlled plasmonic NDAs using Anodic aluminum oxide (AAO) masks
The pore diameter of the AAO mask can be reproducibly controlled in the range of the hexagonal cell size by varying the immersing time of the second chemical wet etching
Summary
Fabrication techniques for two-dimensional (2D) plasmonic nanodot arrays (NDAs) have attracted significant attention in versatile plasmonic applications for the enhancement of the performance of optoelectronic devices and for the highly sensitive detection of biological and chemical sensors [1,2,3]. The LSPR features depending on the shape and size of metal nanostructures have a significant influence on the characterizations of optoelectronic devices such as the change of emission color in OLEDs, the conversion efficiency of solar energy, and the activity of catalyst [13,14,15]. Manufacturing techniques that can reproduce a metal nanoparticle array on a substrate are important for optimizing the performance in plasmonic applications
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