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Abstract
Lead-free piezoelectric thin films of 0.055BaZrO3–0.935(K[Formula: see text]Na[Formula: see text]Li[Formula: see text])NbO3–0.01(Bi[Formula: see text]Na[Formula: see text])TiO3 (BZ–KNLN–BNT) were fabricated on (100)-LaNiO3/SiO2/Si substrates. The Pechini (polymeric precursor) method was carried out to prepare the complicated multi-component precursor solution. This method was suited for controlling the complex components accurately. The films crystallized at 700[Formula: see text]C showed a (100)pc-oriented perovskite structure, whose grain size was about 200[Formula: see text]nm and thickness was about 700[Formula: see text]nm. The Curie temperature [Formula: see text]c of the films was 292[Formula: see text]C that was near to that of the bulk ceramics. The preparation method used in this work provided a possibility for the application of multi-component lead-free piezoelectric films.
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