Abstract
Calcium titanate (CaTiO3) films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm)2 and Ti(O-iPr)2(dpm)2 precursors. The phases, composition and morphology of Ca-Ti-O system films changed depending on molar ratio of Ca to Ti (RCa/Ti), total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at the condition of RCa/Ti ¼ 0:95, Tsub ¼ 1073 K and Ptot ¼ 0:8 kPa, and RCa/Ti ¼ 0:78, Tsub ¼ 973 K and Ptot ¼ 0:8 kPa. The CaTiO3 films prepared at Tsub ¼ 1073 K had a welldeveloped columnar texture, and significant (010) orientation was observed at RCa/Ti from 0.59 to 0.72. The deposition rate showed the highest value of 1:25 � 10 � 8 ms � 1 at Tsub ¼ 1073 K, Ptot ¼ 0:4 kPa and RCa/Ti ¼ 0:95. [doi:10.2320/matertrans.47.1386]
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