Abstract
The technique of plasma polymerization was used in the preparation of the poly (cyanate ester) thin films using 4-methoxyphenol cyanate ester (MPCE), 4-Cumylphenol cyanate ester (CPCE) and 4-phenylphenol cyanate ester (PPCE) as precursors. Different from the conventional thermal polymerization of cyanate ester monomers, the plasma polymerization of three monomers proceeds mainly via the opening of π-bonds of the cyanate ester functional groups which are further formed into a large π-conjugated system. The dielectric properties of the resulting plasma thin films were evaluated and results show that the dielectric constant of the three polycyanurate thin films decreased with increasing frequency, while in contrast, the dielectric loss factor increased with the increasing frequency. The obtained poly (cyanate ester) thin films might be the potential new candidates to be used as intermetallic dielectrics in microelectronics.
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