Abstract

The preparation and characterization of Au-doped iron oxide thin films is reported. Doped-thin films have been prepared by a liquid-phase deposition (LPD) method from aqueous solutions in the presence of a reactive atmosphere containing NH3. The morphology and microstructure of the prepared films are described. The effect of some process parameters (precursor solution concentration, calcination temperature) on the film formation, thickness and microstructure are investigated. Sensor devices based on Au/Fe2O3 thin films deposited on alumina by the LPD method, are sensitive to CO at operating temperatures between 200–400 °C.

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