Abstract
Severe friction is the primary cause of fracture and delamination of diamond coating in tribological applications. Therefore, a surface technology is urgently needed to improve the tribological behavior of diamond coating. The synergistic antifriction effect of transition metal sulfides and texture can alleviate this issue. Micro-textures with precise parameters (width and area ratio) were prepared by Inductively Coupled Plasma Etching techniques (ICP) on the silicon substrate and then coated with diamond and WSx coating. The influence of texture parameters on friction under different normal loads was studied by orthogonal experiments. Results revealed that, compared with the width and load, the area ratio of the texture has a more significant influence on the friction coefficient. The textured diamond/WSx coating with the area ratio of 30% and width of 30 μm showed relatively low friction coefficient (~0.0457) under 5 N load. Then the reducing friction mechanism of the textured diamond/WSx coatings was analyzed based on the variation law of friction coefficient and wear marks. In addition, building on those tests an analytical model for the friction was developed to explain the differences in friction coefficient and predict the optimal texture parameters under different loading conditions.
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