Abstract
Titanium dioxide (TiO2) nanorods were deposited on glass slide and silicon wafer substrate by glancing angle deposition method. The influence of the substrate rotation speed from 10 to 30 rpm on the structure, morphology, optical transmission and wettability were investigated by x-ray diffractometer, field emission spectroscopy, spectrophotometer and contact angle measurement. The results were shown that all prepared samples have amorphous structure. By varying the substrate rotation speed, the TiO2 has a different nanostructure. In addition, the surface of the TiO2 nanorods deposited at 10 rpm was highly hydrophobic property with a water contact angle of 38 degree. The origin of the different wetting properties for TiO2 nanorods films were discussed in this report.
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