Abstract

We report the preparation of lead magnesium niobate titanate films on a buffered silicon substrate using pulsed laser deposition with double-pulse excitation. A Nd:YAG (355 nm) laser and a KrF (248 nm) excimer laser were combined. The film morphology changed drastically concomitant with the delay time. Suppression of droplets was observed when the Nd:YAG (9.0×101 J·cm-2) was used as the first laser and KrF (5.0×10-2 J·cm-2) was used as the second laser with a 0.5 µs time delay. The fluence of the second laser was responsible for the resultant phase and when the fluence of KrF is 9.5×10-1 J·cm-2, a significant amount of pyrochlore type compounds coexisted.

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